Sweden – Industrial machinery – Deep Reaction Ion Etcher (DRIE)
- Buyer
- Uppsala universitet
- Country
- Sweden
- Value
- 1 SEK
- Published
- 2026-10-12
- Deadline
- 2026-11-10
- Type
- cn-standard
- Status
- Open to bid
- Category
- CPV 42000000
Description
Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.
The buyer's description as published on TED (Tenders Electronic Daily). The full notice is at the source.
Around this tender
- Closes in 19 days, on 2026-11-10.
- Uppsala universitet has 7 notices on this site, 7 of them open now, the earliest published 2026-09-28. See them all.
- One of 175 open Manufacturing & equipment tenders in Sweden on this site; where a value is published, the median is 808.0k USD.
- Work under the same CPV group (420) is open in 15 other countries: Germany (6), France (4), Denmark (2), Belgium (2), Finland (2) and 10 more.
Counted from the notices this site holds, which reach back about a month - not everything a buyer has ever published.
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About this record
This notice was published via TED (Tenders Electronic Daily) and indexed automatically. Figures and dates are reproduced as published at source; always confirm against the original before acting on a deadline.