Denmark – Industrial machinery – Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics
- Buyer
- Danmarks Tekniske Universitet - DTU
- Country
- Denmark
- Published
- 2026-10-12
- Deadline
- 2026-11-23
- Type
- cn-standard
- Status
- Open to bid
- Category
- CPV 42000000
Description
DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for oxides and nitrides of silicon to become its new primary instrument for 150 mm wafer processing. Delivery is expected no later than Q3 2027. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. As an open access tool, the Instrument must support the full spectrum of etching of silicon-based dielectrics, from sub 100 nm nanostructures defined by electron beam lithography to depths of several tens of microns. Meeting these demands requires exceptional process controllability and tunability: the system must perform ultra precise, low-rate etches (< 100 nm/min) with smooth and straight sidewalls and minimal undercut for shallow features, alongside…
The buyer's description as published on TED (Tenders Electronic Daily), shortened. The full notice is at the source.
Around this tender
- Closes in 32 days, on 2026-11-23.
- Danmarks Tekniske Universitet - DTU has 16 notices on this site, 7 of them open now, the earliest published 2026-09-23. See them all.
- One of 63 open Manufacturing & equipment tenders in Denmark on this site; where a value is published, the median is 1.4m USD.
- Work under the same CPV group (420) is open in 15 other countries: Germany (6), Sweden (5), France (4), Belgium (2), Finland (2) and 10 more.
Counted from the notices this site holds, which reach back about a month - not everything a buyer has ever published.
Get new Industrial machinery tenders in Denmark by email
One free weekly email with the newest matching notices, each with at least a few days left to respond. No account, unsubscribe in one click.
Other open Manufacturing & equipment tenders in Denmark
About this record
This notice was published via TED (Tenders Electronic Daily) and indexed automatically. Figures and dates are reproduced as published at source; always confirm against the original before acting on a deadline.