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Germany – Miscellaneous special-purpose machinery – Ion beam deposition system

Germany · TED (Tenders Electronic Daily)

Buyer
Ferdinand-Braun-Institut gGmbH Leibniz-Institut für Höchstfrequenztechnik
Country
Germany
Value
2.0m EUR
Published
2026-10-21
Type
pin-rtl
Status
Open to bid
Category
CPV 42990000
View original notice

Description

The Ferdinand-Braun-Institut (FBH) extends its cleanroom equipment in order to realize pilot-lines for bipolar InP-Chiplets and GaAs Laser Chiplets. The FBH wants to acquire a dual ion beam system for its GaAs Laser Chiplets pilot line in order to increase its coating capabilities as well as increase throughput. The Ion beam system should be able to coat laser bars, laser coupons and PICs that are mounted in jigs and wafers up to a diameter of 200 mm with high quality optical coatings such as Al2O3, TiO2, SiO2 and Ta2O5. Key system specifications • Dual chamber (loadlock and process chamber) system capable of ion beam deposition, ion beam etching and dual ion beam sputtering • High level of uniformity over an 8” Wafer • Target-carousel with 4 targets for changing targets without venting the system • Automatic wafer handling • Capability to transfer and process jigs with laser bars having a resonator length larger than 10 mm. • Possibility to control processes using an optical…

The buyer's description as published on TED (Tenders Electronic Daily), shortened. The full notice is at the source.

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About this record

This notice was published via TED (Tenders Electronic Daily) and indexed automatically. Figures and dates are reproduced as published at source; always confirm against the original before acting on a deadline.

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